摘要
利用磁控溅射技术制备了纯ZnO和Ag掺杂ZnO薄膜材料,并对其形貌和光学性质进行了研究.使用XRD、SEM分别对样品的晶体结构、形貌进行分析.结果表明,随着Ag掺杂量的提高晶体沿c轴方向生长逐渐减小,但样品依然是纤锌矿结构.(002)峰位偏移源于部分Zn2+被Ag+所替代,而引起的c轴方向上晶格常数的变化.透射谱测试结果表明Ag掺ZnO对可见光的透过率达到了80%,并比纯ZnO低.另外,利用Z-扫描技术对样品的非线性光学特性进行了分析.结果表明样品都表现了双光子的吸收特性,并Ag掺ZnO薄膜的双光子吸收系数大于纯ZnO薄膜.
In this paper,structural,morphological and optical properties of pure and Ag doped ZnO films by magnetron sputtering have been reported. The structural and morphological of samples are systematically investigated by X-ray diffraction( XRD) and scanning electronic microscopy( SEM),respectively. The results show that samples can still retain a wurtzite structure,although the c-axis as preferred orientation is decreased by Ag doping. The( 002) peak shift ought to be due to the increase of lattice constant in the c-axis direction caused by the partial substitution of Zn2 +ions by Ag+ions. The optical transmittance spectra of Ag doped ZnO films show a transmittance at 80% within the visible wavelength region. Moreover,The nonlinear optical characterized of the samples were studied using Z-scan technique. These samples show two-photon absorption behaviour, and the two-photon absorption coefficient of Ag doped ZnO higher than that of pure ZnO film.
出处
《哈尔滨师范大学自然科学学报》
CAS
2016年第1期63-66,共4页
Natural Science Journal of Harbin Normal University
基金
国家青年自然基金(11504072)
黑龙江省自然基金(F201202)
黑龙江省教育厅骨干教师项目(125G031)
黑龙江省研究生创新科研资金项目(YJSCX2011-414HLJ)
关键词
半导体薄膜
磁控溅射
非线性光学
双光子吸收
Semiconductor films
Magnetron sputtering
Nonlinear optical
Two-photon absorption