摘要
用非平衡磁控溅射与等离子体源离子注入 (PSII)的混合技术 ,研究了类金刚石碳 (DLC)多层膜对 1Cr18Ni9Ti钢微动磨损性能的影响。结果表明 :注入N后 ,改性层内形成了CrN和Fe3N等氮化物相 ;PSII技术能够提高 1Cr18Ni9Ti钢基体的微动磨损性能 ;
The influence of diamond like carbon (DLC) based multi layer coating prepared by the hybrid technique of the unbalanced magnetron sputtering and plasma source ion implantation (PSII) on fretting wear of 1Cr18Ni9Ti stainless steel was investigated. The results showed that some nitrides, such as CrN and Fe 3N formed in the nitrogen implanted layer. Fretting performance revealed that the fretting wear resistance of 1Cr18Ni9Ti substrate increased greatly after PSII treatment. Moreover, the as prepared DLC based multilayer coating exhibited the best fretting resistance, which was mainly related to the high hardness and low friction coefficient of the outermost DLC film.
出处
《机械工程材料》
CAS
CSCD
北大核心
2002年第8期11-14,共4页
Materials For Mechanical Engineering
基金
国防科工委重点项目 (98JS61.5 .1.JWO3 0 4)
