摘要
基础压力是容积真空泵的特征性能指标,但作为容积泵一员的中真空罗茨真空泵却不是,它的性能在很大程度上依赖、取决于前级真空泵和测试条件,只有漏率才是罗茨真空泵的特征性能指标。本文分析了极限压力、基础压力和漏率三者之间的关系,着重指出,漏率的测量与前级泵无关,也基本上不受环境温度的影响,应取代极限压力(基础压力)作为中真空罗茨真空泵的特征性能指标。
The base pressure is the characteristic performance index of positive displacement vacuum pump, but the Roots vacuum pump is not, its performance depends on the backing vacuum pump and test conditions to a large extent, only the leakage rate is the characteristic performance index of Roots vacuum pump. This paper analyses the relationship between the ultimate pressure, base pressure and leak rate, emphatically pointed out that the leak rate measurement has nothing to do with the backing pump and also not affected by the environment temperature, it should replace the extreme pressure(base pressure) as the characteristic performance index of the Roots vacuum pump.
出处
《真空》
CAS
2016年第2期57-60,共4页
Vacuum
关键词
罗茨泵
基础压力
漏率
Roots pump
base pressure
leak rate