电子束抛光技术的研究进展

Research Progress of Electron Beam Polishing Technology

随着现代制造业的发展,人们对于工件表面的精密性和质量提出了更高层次的要求,而抛光工艺不但影响产品的使用性能而且也影响产品的档次。传统的抛光工艺存在一些难以克服的问题,已很难满足当前对高质量工件表面性能的需求,作为新型非接触式抛光工艺的一种——电子束抛光,在目前的研究领域展现出显著的优势。本文概述了几种抛光技术的优缺点,并重点介绍了一种新型材料表面处理技术——电子束抛光,阐述了电子束表面抛光的基本原理及国内外电子束抛光的发展。介绍了电子束抛光作为一种新型表面抛光方法在研究领域中的应用,并综述了近年来电子束抛光研究的发展动态,简述了国内外相关领域的主要研究成果及取得的进展,包括电子束抛光机理的研究、不同材料电子束工艺参数的确定、入射角度对抛光效果的影响、物理模型的建立以及电子束抛光产生的熔坑、裂纹研究,并对电子束抛光技术未来的发展方向和前景做出了展望。电子束抛光技术作为一种极具优势的高能束表面改性技术将占据无法替代的地位。

With the development of modern manufacturing,higher requirements on the precision of workpiece surface and quality are put forward,and the use of polishing process does not only influence the product performance but also affects the grade of the product. There are some insurmountable problems in the traditional polishing process,leading to difficulty in meeting current demand for high-quality surface performance. As a kind of new contactless polishing technology,electron beam polishing shows a significant advantage in the current study field. This article summarized the advantages and disadvantages of several kinds of polishing technology. In this paper,a new material surface treatment technology was introduced,electron beam polishing,the basic principle of electron beam polishing and the development of electron beam polishing at home and abroad were expounded. Applications of electron beam polishing as a new type of surface polishing method in the field of research were introduced,and the research developments of electron beam polishing in recent years were reviewed. The main research results and progress,including the polishing mechanism of electron beam,process parameters determination for electron beam of different materials,the influence of incident angle on the polishing effect,the establishment of physical model and the melting pits and cracks generated by electron beam polishing were introduced,and the future development direction and prospect of electron beam polishing technology were presented.Electron beam polishing technology as a kind of extremely advantageous high energy beam surface modification technology will occupy irreplaceable position in the future.