摘要
论述了ASML公司某型投影光刻机TTL对准系统的基本原理和主要构成,介绍了对准系统在光刻工艺中的工作过程,结合多年的投影光刻机维修经验总结了对准系统的常见故障,并给出了分析以及解决方法。
This article expounds the working principle of ASML stepper TTL align system and its comprised modules,introduces the align system process program,and summarizes the normal faults of the align system,and methods of analysis and problem solving.
出处
《电子工业专用设备》
2016年第4期29-32,共4页
Equipment for Electronic Products Manufacturing
