摘要
采用49-1,PI-5,DOW184以及CAB551四种有机物作为湿敏元件的保护层材料,制作带有保护层的电容式湿敏元件,并对其湿度响应特性与耐污染能力进行研究。实验结果表明,49-1具有更好的综合性能,其湿滞变化为0.18%RH,涂覆后响应时间为11s,污染后初始容值变化为0.190p F,相比于无保护膜的湿度敏感元件变化值减小约20倍,具有良好耐污染特性。该层薄膜不仅起到了保护湿敏元件的作用,且可以降低湿敏元件在有机污染物中的漂移,提高电容式湿敏元件的稳定性。
A capacitive-type humidity sensor contained protecting layer was fabricated by using 49-1,PI-5,DOW184 and CAB551. The sensitivity, hysteresis and pollution resistance of the sensor were systematically investigated. The experimental results show that 49-1 has the better comprehensive performance,the slightly changes of hysteresis and the lower response time compared with that of the others. The layer not only protects the surface of humidity sensor,but also improves the resistance of the humidity sensor to the organic pollution and the stability of the humidity sensor.
出处
《信息技术》
2016年第4期69-72,共4页
Information Technology
基金
国家高技术研究发展计划(863计划)资助项目(2014AA06A505)
中国电子科技集团公司第四十九研究所青年科技创新基金资助项目(QC2014005)
关键词
湿度
传感器
电容式
保护层
humidity
sensor
capacitive-type
protecting layer
