摘要
微机电系统是近代出现的一种微型化、电与机械结合新型技术,有着广泛的、深远的影响。本文根据目前最新研发状态,对微机电系统的未来某几个方面做出合理的猜测,具有很大的可行性。
Microelectromechanical systems, a microscopic and mechanical-electrical integrated new technology that emerged in modern times, are of wide and profound influence. In accordance with the latest state of research and development, this paper makes some rational speculations on the future of microelectromechanical systems, holding that they are highly feasible.
出处
《科教文汇》
2016年第12期186-187,共2页
Journal of Science and Education
基金
基于Multi-Agent煤矿安全监控系统研究
编号:2015Z003
关键词
微机电系统
机电结合
微型系统
microelectromechanical systems
mechanical and electrical integration
microsystems
