多晶硅装置还原/氢化布置设计优化

Reduction/Hydrogenation Unit Layout Design Optimization of Polysilicon Plant

还原/氢化厂房是多晶硅装置最重要的单元之一,分析四种不同风格的工艺包炉型(GT,PPP,MSA,SOLIMIC)的布置,找出值得研究的问题,归纳出厂房布置设计优化方案的要点。

Reduction/hydrogenation unit is one of the most important units of polysilicon plant. This paper analyzes the layouts of four different styles of furnaces of technology package(GT,PPP,MSA and SOLIMIC) to identify issues worthy of study and summarizes the main points of plant layout design optimization.