高效过滤器检漏用气溶胶光度计校准方法的研究

Research on Calibration Method for Aerosol Photometer of HEPA Filter Leak Test

气溶胶光度计主要用于洁净室等净化环境中高效过滤器检漏测试,其数值准确性直接关系到对于洁净环境的最终测试结果。目前国内外并没有对于气溶胶光度计量值溯源的相关标准。根据气溶胶光度计本身性能和出厂技术要求,探讨了相关的校准方法。

Aerosol photometer is mainly used to clean room environment in HEPA filter leak testing,its accuracy is directly related to the clean environment of the final test results.There is no relevant standards for the aerosol photometer calibration.This paper according to the aerosol photometer performance and factory technical requirements,to discuss the calibration method of aerosol photometer.