溶胶-凝胶法制备ZnO及Fe掺杂ZnO薄膜及其表征

Preparation and characterization of ZnO and Fe-doped ZnO films by sol-gel method

采用溶胶-凝胶法在玻璃基体上制备了ZnO和Fe掺杂ZnO薄膜,并通过扫描电子显微镜、原子力显微镜、X射线衍射仪和紫外-可见分光光度计对所制备薄膜的表面形貌、结构和光学性能进行分析。结果表明,2种薄膜均表面光滑,为沿(101)晶面取向的纤锌矿结构;与ZnO薄膜相比,Fe掺杂ZnO薄膜表面更光滑,且晶粒尺寸从58.512nm减小到36.460nm;另外,Fe掺杂后,沿(101)晶面的取向程度减弱,且禁带宽度由3.1eV增大到3.4eV。

ZnO and Fe-doped ZnO thin films are prepared on glass substrate by sol-gel method,and the surface morphology,structure and optical property are analyzed by scanning electron microscope（SEM）,atomic force microscopy（AFM）,X-ray diffraction（XRD）and UV-Vis-NIR spectrophotometer.The results show that both films have a smooth surface and a hexagonal wurtzite structure with orienting along the（101）plane.Compared with the ZnO film,the surface of Fe-doped ZnO film becomes smoother,and its grain size decreases from 58.512 nm of the ZnO film to 36.460 nm.Moreover,after Fe doping,the orientation degree of（101）plane is weakened,and the optical band gap energy increases from 3.1eV of the ZnO film to 3.4eV.