共焦法在不同环境对定焦间距精度的影响

The Influence of Confocal Method on the Accuracy of Fixed Pitch in Different Environment

大口径长焦距光学元件的测量一直没有好的解决办法,现利用激光共焦组合焦距测量原理对光学元件进行测量。由于焦点之间的间距值误差传递系数最高,所以要对定焦间距进行准确定焦。对包括被测超长焦距的透镜和未包括超长焦距透镜的激光共焦系统进行两次精确定焦,通过测量两定焦焦点位置之间的距离来获得定焦间距;并在不同的环境下反复测量,以观察环境对于测量精度的影响。通过测量结果可以知道,利用有机玻璃框隔离时测量精度更高,标准差可以达到0.005 4。

With large aperture and long focal length optical measurement has no good solution. Laser confocal combination principle of focal length measurement is used to measure the optical element due to the focus between the spacing value error transfer coefficient was the highest,so the focal distance for the accurate focus. The laser confocal system including the long focal length lens and the non-long focal length lens were measured. The distance between two fixed focal length and the distance between 0. 005 4 fixed focal length was measured,and the influence of the measurement accuracy was measured.