电注入椭圆微腔半导体激光器热特性分析

Thermal Characterization of Electrically Injected Elliptical Microcavity Lasers

对长轴为12μm、短轴为10μm并在长轴处直连2μm宽输出波导的椭圆微盘激光器的热特性进行了实验和理论分析。测量连续电流注入微腔激光器的稳态特性,根据其波长红移计算器件热阻为ZT=0.846 K/m W。用有限元分析法计算椭圆微腔的热阻,理论与实验结果相吻合,热阻的最大偏差为5%。研究了微腔激光器衬底厚度对微腔有源区温度的影响,通过引入侧向散热机制有效改善了微腔激光器的热特性。

The thermal behaviors of the elliptical microcavity laser are analyzed experimentally and theoretically.The major axis of the elliptical microdisk is 12 μm, the minor axis is 10 μm, and the output waveguide with width of 2 μm is connected directly. The thermal characteristics are investigated based on the lasing characteristics for continuous-wave electrical injection operations. The mode wavelength shift is used to estimate the temperature impedance（ZT=0.846 K/m W） during continuous operation. Based on the finite-element modeling, the thermal impedance is simulated for the elliptical microcavity laser and the simulation results are in good agreement with the experimental data. The maximum temperature impedance deviation between the simulated and experimental results is about 5%. The temperature rise in the active region as a function of the substrate size is investigated. The simulated results indicate that the heating performance of the benzocyclobutene-confined elliptical microcavity laser can be greatly improved by using an interlayer thermal shunt.