接触触发式探头结构优化设计

Optimal Design for the Structural of Touch Trigger Probe

设计了一种适用于微纳米三坐标测量机的高灵敏度接触触发式探头。介绍了该探头的结构和原理，建立了探头的灵敏度模型和刚度模型，依据三维方向等灵敏度和等刚度的原则，利用最优化方法得出了探头结构参数的最优解。对探头的刚度进行了仿真验证；分别对探头的刚度、分辨率以及稳定性进行了实验测试。实验结果表明：该探头在三维方向上的刚度均小于1mN／μm，且近似相等；分辨率高于50nm；当环境温度的波动范围小于±0．025℃时，探头在1．3h内的漂移量为20nm。

A high sensitivity touch trigger probe for Micro/Nano CMM has been designed. The principle and the structure of the probe were introduced, and the sensitivity and stiffness models were established. The optimal parameters conforming to the uniform sensitivity and uniform stiffness in 3D were obtained. The stiffness of the probe was verified by simulation. The stiffness, resolution and the stability of the probe were tested. The experimental results show that the probe has uniform stiffness （less than 1 mN/μm） in 3D and the resolution of the probe is higher than 50 nm. The drift of the probe is about 20 nm in 1.3 hours when the fluctuation of the environmental temperature is less than ± 0. 025 ℃.