箔片动压气体轴承系统中箔片表面涂层材料的测试表征

Testing and Characterizing on Foil Surface Coating Material Used in Foil Air Bearing System

采用X射线衍射仪（XRD）、扫描电子显微镜（SEM）以及能谱仪（EDS）分析了箔片动压气体轴承系统中箔片表面涂层的物相组成及显微结构,测量了涂层的厚度,并利用微粒喷浆冲蚀（MSE）法测试了涂层的表面磨损率。结果表明：箔片轴承表面涂层平均厚度在30~40μm,使用后涂层内含有大量的裂纹,成为导致破坏的重要因素;箔片涂层中含有耐磨组分Cr_2O_3和高温润滑组分CaF_2。通过箔片涂层的MSE测试结果可知,当存在裂纹等缺陷时,箔片涂层的耐磨损冲蚀性能较差,因此提高涂层的连续性和完整性至关重要。

X-ray diffractometer（XRD）,scanning electron microscope（SEM）and energy dispersive spectrum（EDS）were adopted to analyze the phase compositions and microstructure of the foil surface coating of foil gas bearing system,and the thickness of the coating was also measured.At the same time,the surface wear rate of the coating was determined using micro slurry-jet erosion（MSE）method.The results indicate that the average thickness of the coating was 30~40μm,and there were a lot of micro-cracks which were believed to be the important factor causing damage after use.Wear resistant composition Cr_2O_3 and high temperature lubrication composition CaF_2 were identified in the foil coating.MSE test results of the foil coating show that the coating＇s erosion resistance would become worse while crack defects existed,and therefore to enhance the continuity and integrity of the coating was of vital importance.