摘要
分析了迈克尔逊干涉仪中动镜和定镜在圆形通光孔径情况下动镜在扫描过程中倾斜对干涉调制度的影响.为满足干涉调制度要求,理论计算发现动镜倾斜角度需控制在1″以内,对应的相位误差为±6.6°以内.为了解决此问题,使动镜和定镜保持准直,采用定镜动态校准系统对动镜倾斜误差进行校准.实验结果表明,校准后的XR和YR相位误差的均方根分别为1.02°和1.25°,满足系统要求.动态校准系统能够有效地校准动镜长距离运动过程中发生的倾斜误差,对高分辨光谱仪的设计和研制具有一定的指导意义.
Theeffect of the moving mirror tilt errors on the modulation depth wasanalyzed for the circular aperture in Michelson interferometer.To meet the requirements of interference modulation,the tilt angle of the moving mirror is best controlled within 1″under the theoretical calculation,corresponding to the phase error within ±6°.In order to solve the key problem,the dynamic alignment system wasused to align the tilt error of the moving mirror,and make alignment between the moving mirror and the fixed mirror.The experimental results show that the root mean square of phase errors XRand YRis 1.02°and1.25°respectively by dynamic alignment system to satisfy the systems requirements.It is shown that the dynamic system can effectively align the tilt error of the moving mirror in the longer distance movement process.It is a certain guiding significance to design and develop for the spectrometer with higher resolution.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2016年第4期163-167,共5页
Acta Photonica Sinica
基金
国家重大科学仪器设备专项(No.2013YQ22064302)
中国科学院战略性先导科技专项(No.XDB05050302)
国家自然科学基金(No.41405029)
安徽省科技攻关计划(No.1301041024)资助~~
关键词
迈克尔逊干涉仪
动镜倾斜
调制度
相位差
动态校准
Michelsoninterferometer
Tilting of the moving mirror
Modulation depth
Phase error
Dynamic alignment
