三管燃烧器在生长室内燃烧特性的数值模拟

Simulation of Combustion Characteristics of Three-tube Burner in Growth Chamber

通过研究三管燃烧器在生长室内的燃烧特性,分析了喷嘴结构对燃烧特性的影响。结果表明:H_2从喷嘴流出后,由于内O_2与外O_2的作用,在中心和近壁面处产生两股火焰。外O_2和H_2吹入深度接近,相互扩散明显,燃烧反应完全,生长室的氧化气氛主要通过内O_2实现。晶体熔帽所受压力主要来自于中心气流的作用,熔帽中心受到最大的压应力作用,而在晶体熔帽边缘附近,气流对熔体产生的压力为拉应力。喷嘴内O_2孔径对晶体熔帽表面温度和压力的影响比较明显,而外O_2环直径的影响很小,H_2环直径对熔帽温度影响较大,对压力的影响很小。

Combustion characteristics of three-tube burner in growth chamber for the preparation of single crystal by a flame fusion method were investigated. The effect of nozzle structure on the combustion characteristics was analyzed. The results show that hydrogen flowed out from the nozzle diffuses with inner and outer oxygen, and two flames occur in the center and near the wall of growth chamber. The blowing depth of hydrogen is closed to outer oxygen, and the combustion reaction of hydrogen and oxygen is complete due to the significant mutual diffusion. The oxidizing atmosphere appears mainly by inner oxygen in growth chamber. The pressure of the molten cap of crystal is mainly derived from the central oxygen flow, and the maximal pressure of center and edge of molten cap is compressive and tensile. The inner oxygen aperture has an effect on the surface temperature and pressure of the molten cap of crystal but the outer oxygen diameter has a slight effect on the surface temperature and pressure of the molten cap of crystal. The diameter of hydrogen ring has an effect on the temperature of molten cap, but has a slight effect on the pressure.