摘要
Y2000-62169-69 0020062在净化室内由学生完成硅-锗薄膜晶体管=Student re-alization in cleartroom of silicon-germanium thin filmtransistors[会,英]/Guillet,D.& Mourgues,K.//Pro-ceedings of the 1999 International Conference on Micro-electronic Systems EdHcation(MSE’99).-69～70(YP)
出处
《电子科技文摘》
2000年第12期32-33,共2页
Sci.& Tech.Abstract
