摘要
Y2002-63084-313 0213687具有沉积刚性电极的闭环微 G 硅加速度计的性能局限性=Performance limits of a closed-loop micro-G siliconaccelerometer with deposited rigid electrodes[会,英]/Yazdi,N.& Najafi,K.//ICM 2000 Proceedings of theTwelfth International Conference on Mieroelectronies.—313~316(PE)
出处
《电子科技文摘》
2002年第7期98-100,共3页
Sci.& Tech.Abstract