基于MOCVD温度控制系统结构研究

Based on MOCVD Temperature Control System Structure Research

目前,MOCVD控制系统采用集散控制方式,其中上位机采用工业控制计算机,下位机采用S7-300PLC。上位机完成信号的采集、控制和数据处理功能,下位机完成信号的转换功能,直接与工艺现场相连。本文的目标就是设计一个新的具有很强处理能力的温度控制器,它将居于整个系统的核心地位。该温控器既完成信号的转换功能,直接与工艺现场相连,又能采集信号、控制过程和处理数据,取代相当部分本来由上位机处完成的功能。具体软硬件设计进行详细讨论。

At present,the MOCVD control system uses the collection and distribution control mode,on in which the position machine uses the industry control computer,the lower position machine uses S7-300PLC.On the position machine completes the signal gathering,the control and the data processing function,the lower position machine completes the signal the transformation function,direct and the craft scene is connected.This article goal is designs one newly to have the very strong handling ability temperature controller,it will reside in the overall system the core status.This warm controls both completes the signal the transformation function,is directly connected with the craft scene,and can gather the signal,the controlled process and the processing data,the substitution are quite partial originally the function which place completes by on position machine.The concrete software and hardware design carries on the detailed discussion.