不同尺寸微腔介质阻挡放电的对比研究

Comparative Study on Microcavity Dielectric Barrier Discharge of Different Dimensions

为进一步降低放电起始电压,产生数量较多、分布较均匀的低温等离子体,设计并制作了一种印刷电路板上的新型微电极——微腔结构电极,在高频正弦交流电压下,对尺寸l为0.3 mm、0.5 mm和1.0 mm微腔结构电极进行实验,根据得到的Lissajous图形进行分析。实验研究表明:外加电压相同条件下,微腔阵列的表面积与接地电极的面积之比D为0.69时,微腔与接地电极间的等效电容C_q、放电气隙电压U_g、半个周期内放电通道传输的电荷量Q_g、平均放电功率P均达到最大;但微腔电介质表面功率密度ρ却在D为0.36时达到最大;且高压电极与接地电极间的等效电容C_d变化很小,基本接近于静态介电常数对应的数值。

To further reduce the starting voltage of discharge and produce low temperature with larger quantity and more uniform,we make a new type of micro electrode（ microcavity structure electrode） on the printed circuit board,based on high frequency AC power supply,do experiments on 0. 3 mm,0. 5 mm,1. 0 mm microcavity structure electrode,achieve lissajous figures and study dielectric barrier discharge of microcavity structure electrode. The experimental results show that under the same conditions of the applied voltage,when the ratio of the surface area of the microcavity array to the area of the ground electrode D is equal to 0. 69,the capacitance Cq between the upper surface of barrier dielectric and the grounding electrode,the air-gap voltage Ug of discharge,amount of charge Qg in the half cycle of voltage transferred in the discharge channel and the average discharge power P reach the maximum,but the power density ρ of the microcavity surface reach the maximum,when D is equal to 0. 36,and the equivalent capacitance Cd between the high voltage electrode and the grounding electrode changes very small and is approximately equal to the value of the static permittivity.