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Direct growth of graphene on gallium nitride using C2H2 as carbon source

Direct growth of graphene on gallium nitride using C2H2 as carbon source
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摘要 Growing graphene on gallium nitride (GaN) at temperatures greater than 900℃ is a challenge that must be overcome to obtain high quality of GaN epi-layers. We successfully met this challenge using C2H2 as the carbon source. We demonstrated that graphene can be grown both on copper and directly on GaN epi-layers. The Raman spectra indicated that the graphene films were about 4-5 layers thick. Meanwhile, the effects of the growth temperature on the growth of the graphene films were systematically studied, and 830℃ was found to be the optimum growth temperature. We successfully grew high-quality graphene films directly on gallium nitride. Growing graphene on gallium nitride (GaN) at temperatures greater than 900℃ is a challenge that must be overcome to obtain high quality of GaN epi-layers. We successfully met this challenge using C2H2 as the carbon source. We demonstrated that graphene can be grown both on copper and directly on GaN epi-layers. The Raman spectra indicated that the graphene films were about 4-5 layers thick. Meanwhile, the effects of the growth temperature on the growth of the graphene films were systematically studied, and 830℃ was found to be the optimum growth temperature. We successfully grew high-quality graphene films directly on gallium nitride.
出处 《Frontiers of physics》 SCIE CSCD 2016年第2期97-102,共6页 物理学前沿(英文版)
关键词 GRAPHENE C2H2 gallium nitride chemical vapor deposition Raman spectroscopy graphene, C2H2, gallium nitride, chemical vapor deposition, Raman spectroscopy
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