摘要
本文介绍了近场微波显微镜(NSMM)的主要结构及其进行介电常数定量测量的方法。本文基于有限元分析方法,采用HFSS和COMSOL软件对NSMM进行仿真,研究了探针和样品间距和样品介电常数引起的测量影响。
The main structure of the near-field scanning microwave microscopy （NSMM） and the quantitative measurement of the dielectric constant were introduced in this paper. The research is based on finite element analyze. HFSS and COMSOL are employed to simulate the NSMM. The influence of the tipsample distance and the dielectric constant of the sample on measurements are investigated.
出处
《真空电子技术》
2016年第2期62-63,68,共3页
Vacuum Electronics
基金
国家自然科学基金(批准号:61301053和11375155)
中国博士后科学基金会(批准号:20100481377)
微波电真空器件国家级重点实验室
中央高校基本科研业务费专项资金(批准号:ZYGX2011J044)
关键词
近场微波显微镜
介电常数
定量测量
Near-field scanning microwave microscopy, Dielectric constant, Quantitative measurement
