摘要
本文首先分析了传统碳化设备在实现碳化工艺过程中存在的问题(包括碳化压力不稳定、阴极电流不受控、碳化时间精度差等),然后针对这些问题进行了系统的研究,基于研究成果设计了新型程控真空碳化设备,并对新型和传统碳化设备做了大量应用对比实验。实验结果证明,在实际应用中新型程控真空碳化设备能够精确控制碳化压力、阴极电流及时间等参数,解决了传统碳化设备的瓶颈问题,具有碳化质量高、结果一致性好、生产效率高等优点。
Problems of traditional carbonization equipments including instable carbonization pressure, uncontrollable cathode current and poor accuracy of carbonization time were analyzed. Systemic research aiming to the problems was made and new type program-controlled vacuum carbonization equipments were proposed based on the research results. Comparative experiments between the new carbonization equipments and the traditional ones were made. The experiments indicate that the new equipments can solve the bottleneck problems of traditional ones; they have precise control on carbonization pressure, cathode current and carbonization time which makes high quality, high production efficiency and good uniformity.
出处
《真空电子技术》
2016年第2期64-68,共5页
Vacuum Electronics
关键词
碳化压力
阴极电流
碳化时间
程控控制
一致性
Carbonization pressure, Cathode current, Carbonization time, Program-controlled, Uniformity