摘要
In order to improve the scheduling efficiency of photolithography,bottleneck process of wafer fabrications in the semiconductor industry,an effective estimation of distribution algorithm is proposed for scheduling problems of parallel litho machines with reticle constraints,where multiple reticles are available for each reticle type.First,the scheduling problem domain of parallel litho machines is described with reticle constraints and mathematical programming formulations are put forward with the objective of minimizing total weighted completion time.Second,estimation of distribution algorithm is developed with a decoding scheme specially designed to deal with the reticle constraints.Third,an insert-based local search with the first move strategy is introduced to enhance the local exploitation ability of the algorithm.Finally,simulation experiments and analysis demonstrate the effectiveness of the proposed algorithm.
In order to improve the scheduling efficiency of photolithography, bottleneck process of wafer fabrications in the semiconductor industry, an effective estimation of distribution algorithm is pro-posed for scheduling problems of parallel litho machines with reticle constraints, where multiple reti-cles are available for each reticle type.First, the scheduling problem domain of parallel litho ma-chines is described with reticle constraints and mathematical programming formulations are put for-ward with the objective of minimizing total weighted completion time.Second, estimation of distribu-tion algorithm is developed with a decoding scheme specially designed to deal with the reticle con-straints.Third, an insert-based local search with the first move strategy is introduced to enhance the local exploitation ability of the algorithm.Finally, simulation experiments and analysis demonstrate the effectiveness of the proposed algorithm.
基金
Supported by the National High Technology Research and Development Programme of China(No.2009AA043000)
the National Natural Science Foundation of China(No.61273035,71471135)
关键词
分布估计算法
分配算法
调度问题
光刻机
并行
加权总完工时间
掩模
半导体产业
semiconductor manufacturing, parallel machine scheduling, auxiliary resource constraints, estimation of distribution algorithm
