二氧化硅波导马赫-泽德型2×2热光开关损耗对设计与加工精度的依赖性研究

Study of the Precision Dependence of 2 × 2 Silicon-on-insulator Mach-zehnder Thermo-optical Switch Performance

用有限差分光束传播法(Three-dimensional beam Propagation Model,3D-BPM)三维模拟技术,系统研究了基于单模波导定向耦合器的马赫-泽德2×2热光开关对器件的设计方法及加工精度的依赖关系。由于器件的光学损耗与器件结构误差有很大的影响,所以将实际测得的加工误差转换为公差后引入到设计中,对器件的性能进行优化,使器件的插入损耗改进到1.5d B以下,即芯片上的光损耗减小到0.5d B以下,隔离度提高到20d B以上,可提高实际产品设计与生产的成功率。

The fabrication precision dependence and the design method of a 2×2 switch structure characteristics are sys-tematically studied with three-dimensional beam propagation method. It turns out that the errors of the device influence the optical performance a lot. Thus, the fabrication precision errors were adopted and introduced them into the perfor-mance simulations and optimization of the 2×2 optical switch to reduce the optical on-chip loss of 0.5dB,the insertion loss less than 1.5dB,and an isolation of 20dB. Thereby,it＇s good to improve the success rate of the design and pro-duce of the optical communication devices.