摘要
为满足多晶硅行业生产中高温含尘气体过滤的需求,本文开展了Fe基高温气体净化膜材料成形和烧结工艺研究,获得了支撑体以及微滤膜层的最佳制备工艺。结果表明:本实验选用的Fe基粉末采用气氛烧结的最佳烧结温度为1 280℃,在该温度下所获样品的耐压强度为113.82 MPa,相对透气系数223.84 m3/m2·KPa·h,通过粉末湿法喷涂技术制备了金属微滤膜层,获得的Fe金属微滤膜元件对于1μm的气体粉尘过滤效率可达98%以上,完全满足了多晶硅等行业生产中高温含尘气体净化分离的需求。
In order to meet the requirements of high temperature gas filtration in polysilicon industry production,porous Fe based materials were prepared by cold isostatic pressing,and the optimum shapping and sintering technics of filters tubes were obtained. The results show that the optimum sintering temperature is 1 280 ℃ with the crushing strength of113. 82 MPa,relative permeability of 223. 84 m3/ m2·KPa·h,and the metallic membrane is fabricated by powder wet spraying method. The gas filtration efficiency to 5μm particles of the filter is 99. 9%. These results show that Fe based filters can meet the requirements of the ash filter in polysilicon industry and other high temperature gas filtration.
出处
《粉末冶金技术》
CAS
CSCD
北大核心
2016年第2期101-105,共5页
Powder Metallurgy Technology
基金
国家高技术研究发展计划(863)计划(2012AA03A610)
国家重点基础研究发展规划(973计划)(2012CB723907)
关键词
高温含尘气体分离Fe基
过滤材料
过滤效率
high temperature filtration
Fe based materials
filter materials
filtration efficiency
