MEMS三轴加速度计6位置标定方法的研究

The Research on Six-Position Calibration of MEMS Three Axis Accelerometer

针对本课题组十二位置法测试时间长的问题,提出了MEMS三轴加速度计的6位置标定方法。首先建立了三轴加速度计的输入输出误差模型,然后详细介绍了6位置标定的位置编排和过程,给出了数学模型中标度因数、安装误差系数以及零偏值的计算方法,最后通过三轴转台实验验证了6位置标定方法的可行性及模型的准确性。结果表明6位置标定方法简单可行,补偿后精度能够提高1～2个数量级,为其工程实用性奠定了理论基础。

Aiming at the problem of long time which twelve-position calibration in the research team encountered, six-position calibration of MEMS three-axis accelerometer is proposed. Firstly,the input and output model of three axis accelerometer is established,and the position arrangement and procedure of six position calibration are intro-duced in detail,then the calculation method of the mathematical model parameters including scale factor,installa-tion error coefficient and zero bias value are given. Finally,three-axis turntable experiment verified the feasibility of the six position calibration method and the accuracy of the model. The experiment results show that the six position calibration method is simple and feasible,and the accuracy can be improved by 1~2 magnitudes after compensa-tion,this lays the theoretical foundation of its engineering practicability.