摘要
设计了一种基于声表面波谐振器的压力传感器，其敏感单元采用声表面波器件制成的简支梁结构，采取集中载荷在叉指换能器背部施力的方式。为保证压力传导方向的一致性，设计并制作了双平行四簧片导向机构，并利用ANSYS软件对其进行了仿真验证。最后进行了力学加载实验，发现该压力传感器具有极高的灵敏度，而且重复性误差、迟滞性误差较小。实验结果为声表面波压力传感器的结构设计提供了有益参考。
A novel pressure sensor based on surface acoustic wave （SAW） resonator was designed, whose sensing unit is a simply supported beam made by SAW devices, and it is forced by concentrate load from the back side of IDT. A new double-paralell-four-spring guiding mechanism was designed and made to ensure that pressure transmission direction of the sensor could be consistent, then computer simulation by ANSYS software was made to test its guiding performance. Final experiment showed that this SAW resonator has high sensitivity, meanwhile it has little repeatability error and hysteresis error. It provides useful reference for the design of SAW pressure sensor structure.
出处
《现代科学仪器》
2016年第2期30-35,共6页
Modern Scientific Instruments
基金
重庆市重大应用开发计划（cstc2013yykfc60002）资助项目
关键词
声表面波谐振器
压力传感器
集中载荷
导向机构
Surface acoustic wave resonator
Pressure sensor
Concentrate load
Guiding mechanism
