电视、激光、中波红外多波段增透膜研究

Research on antireflection coating for TV,laser,mid-infrared wavebands

针对多光谱成像中存在的多光谱共光路问题,在ZnSe基底上设计了三波段增透膜。通过选取合适的薄膜材料,利用TFCalc膜系设计软件对膜系进行设计与优化,使用热蒸发和离子源轰击结合的方式沉积膜层,采用分光光度计和傅里叶红外光谱仪测量光谱特性。通过设计粘结层与保护层,有效提高了膜层与基底之间的结合力以及膜层的强度。该膜层可以实现多光谱ZnSe基底在电视（500-800 nm）、1064 nm激光和中波红外（3.7-4.8μm）三个波段高效增透,且具有良好的环境适应性。

Aiming at the multispectral common path in multispectral imaging,the antireflection film with tri-waveband on ZnSe substrate was designed.By selecting the appropriate film material,the film was designed and optimized by TFCalc software.The thermal evaporation and ion impact were used to deposit the film;the transmission spectrum was measured using spectrophotometer and Fourier infrared spectroscopy.The intensity and the adhesion between the substrate and the films were increased effectively by designing the protective layer and adhesive layer.The film can achieve high transmission on TV,1064 nm laser and mid-infrared wavelength,and has good environmental adaptation.