摘要
PVD(物理气相沉积)作为一种新型绿色的镀膜技术,由于涂层具备硬度高、耐磨性好、摩擦系数低、化学性能稳定、耐热耐氧化的特点,使其在机械、电子和光学行业得到广泛应用。近些年来随着PVD技术应用领域的不断扩展,对涂层的性能提出了更高要求,在保障力学性能的同时,如何提高涂层耐蚀性成为研究热点。概述了PVD技术应用于材料防腐的相关研究,综述了PVD涂层的成分、结构与耐蚀行为的关系,同时分别阐述了在PVD技术中提高涂层耐蚀性能的方法与机理。
As a new green coating technology,physical vapor deposition（PVD）processes have been widely applied to thin film deposition nowadays in mechanic,electronic and optics industries due to its merits of high hardness,wear resistance,low friction coefficient,chemical stability and thermal oxidation resistance of the deposited coatings.In recent years,with the continuous expansion of PVD technology applications,higher requirements for the performance of the coatings have arose,and how to improve the corrosion resistance while ensuring the mechanical properties of the coating has become a hot topic.The paper outlines the application of PVD in anti-corrosion materials,reviews the relationship between growth characteristics,component and corrosion behaviors,and respectively expounds the improving methods and mechanisms of corrosion resistance of the coating in the PVD technology.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2016年第9期75-80,共6页
Materials Reports
基金
南通市产学研协同创新计划项目(BC2014010)
上海市钢铁冶金新技术开发应用重点实验室开放课题基金(SELF201501)
关键词
物理气相沉积
抗腐蚀
化学成分
涂层结构
膜基界面
physical vapor deposition
anti-corrosion
chemical composition
coating structure
film-substrate interface
