原子层沉积技术及其在粉体材料上的应用进展

Atomic layer deposition and its development of the application on the powder materials

原子层沉积技术因其具有精确的沉积厚度控制、良好的保形性、均匀性等特点,已经成为一项重要的薄膜沉积技术。而粉体材料作为材料的一种重要的表现形式,其改性技术对整个材料行业都具有重大意义。原子层沉积在粉体材料特别是纳米粉体的表面改性方面也有其应用。综述了原子层沉积的原理及其在粉体材料处理方面的进展。

Atomic layer deposition has become a very important film preparation method for its precise thickness control,conformal and continuous pinhole-free film deposition.The surface modification of powders means a lot in the materials industry,as powder is one of the major forms of materials.On the surface modification of powders,especially nanoparticles,atomic layer deposition is very useful.This was a review about the atomic layer deposition and its developments of the applications on the powder materials.