异形微透镜阵列热压印制造方法研究

Methods research of special micro lens array thermal printing

通过常用微透镜制造方法比如熔融光刻胶法、反应离子束刻蚀技术、微喷打印法、飞秒激光加工法、热压印法等的比较,认为采用飞秒激光加工以及局部腐蚀的方法能够加工各种形状的微透镜阵列,而且加工时间短,制造成本低,微透镜最小特征尺寸可以达到30μm以内。将飞秒激光加工的微透镜阵列作为模板,运用热压印技术进行复制,不仅能够获得质量良好的微透镜阵列,还能够批量化生产以减小制造成本。

Through micro lens manufacturing methods such as melting photoresist, reactive ion beam etching technique, micro jet printing method, femtosecond laser processing method, thermal priming, such as comparison, it is concluded that： using femtosecond laser machining and the method of local corrosion to various shapes of micro lens array, and short processing time, low manufacturing cost, micro lens minimum feature sizes can be reached within 30 microns.The femtosecond laser machining of micro lens array as a template, using thermal printing technology to reproduce, can not only obtain good quality micro lens array, will also be able to mass production to reduce manufacturing costs.