通过优化工作气体分压提高准分子激光器脉冲能量输出(英文)

Optimizing performance of KrF excimer laser by modifying active medium gas partial pressures

分别研究了Ne、F_2和Kr对KrF准分子激光器脉冲能量输出的影响.理论分析了Ne作为缓冲气体在激光器放电过程中的碰撞过程,并对Ne与其他种类缓冲气体进行了对比分析.F_2分压对脉冲能量输出的影响非常明显。工作气体中Kr参与的三体碰撞过程占主导地位,激光脉冲能量输出与Kr分压呈二次函数关系。当充电电压为28.7 kV,在最优化工作气体分压(F_2:He:Kr:Ne=0.315:5.985:19.5:305 kpa)下获得的最大单脉冲输出能量为807 mJ,全电效率为1.64%.

Dependence of KrF excimer laser output energy on gas partial pressures of Ne,F_2 and Kr is investigated,respectively.Collision processes related to Ne are analyzed theoretically and compared with that of other kinds of buffer gas.The output energy is extremely sensitive to the partial pressure of F_2.The three body collision related to Kr is dominant in the discharge process.The pulse energy thus quadratically depends on the partial pressure of Kr.Maximum output energy of 807 mJ with an overall efficiency of 1.64% is achieved for the optimum gas mixture of F_2：He：Kr：Ne = 0.315：5.985：19.5：305 kpa when the charging voltage is 28.7 kV.