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三维集成电路硅通孔热特性的COMSOL模型 被引量:1

The COMSOL Model for Through-Silicon Via Thermal Characteristics of Three-Dimensional Integrated Circuit
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摘要 利用COMSOL软件建立了三维集成电路散热模型并进行仿真。仿真结果显示,在元胞块之间插入TSV网络可以有效将三维集成电路温度控制在一个安全范围之内,而且随着TSV半径的增大,三维集成电路散热效果更好。 The COMSOL model for the 3DIC heat dissipation is established to simulate.The simulation results show that TSV network can effectively control the temperature of the 3DIC within a safe range,and when increasing the radius of TSV,three-dimensional integrated circuit may have a better cooling effect.
出处 《唐山学院学报》 2016年第3期41-46,共6页 Journal of Tangshan University
基金 国家自然科学基金地区科学基金项目(61464002) 贵州省科技合作项目(黔科合LH字[2015]7636)
关键词 三维集成电路 硅通孔 散热问题 COMSOL模型 three-dimensional integrated circuit through-silicon via cooling problem the COMSOL model
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