Bi_2Te_3柔性热电薄膜发电器件

Power Generation Device of Bi_2Te_3 Flexible Thermoelectric Thin Film

在几种形状不同的柔性电路板上磁控溅射Bi_2Te_3薄膜,温差测试之后进行结构的优化设计。在给予一定温差条件下,测量优化设计后的柔性热电薄膜在退火前后的输出电压和电阻率,并提出了改进措施。研究表明:优化后的柔性热电薄膜相较之前有很大的改善;柔性热电薄膜输出的电压与提供的温差近似呈线性关系;在温差为200K时,输出电压为310mV,电阻率为0.792mΩ·cm;200℃/h真空退火后,输出电压增大到368mV,电阻率也同时增大,达到0.869mΩ·cm。

Bi_2Te_3 thin films were fabricated on flexible circuit boards of several different shapes by magnetron sputtering,then followed was the temperature difference test to optimize the structure design.Giving a certain temperature difference conditions,the output voltage and the resistivity of thermoelectric thin film after optimized design were measured before and after annealing,and improvement measures were proposed accordingly.Studies have shown that：The performance of the flexible thermoelectric film after optimization has been greatly improved comparing to the previous;The output voltage and temperature difference of the flexible thermoelectric thin film are almost linearly related.At a temperature difference of200 K,the output voltage is 310 mV,the resistivity is 0.792mΩ·cm;after 200℃/h vacuum annealing,the output voltage increases to 368 mV,the resistivity is also increased up to 0.869mΩ·cm.