液相单片阵列式压电传感器测量系统研究

Monolithic piezoelectric sensor array system for liquid phase

阵列化、集成化、智能化是近年来压电传感器的重要研究方向,因此本文设计并研制了一种用于液相检测的单片式阵列压电传感器测量系统,在单个压电晶片上制作五个电极单元,并以塑料封装的形式用于液相检测,五对电极由单片机控制选时导通,以消除测量时的共性干扰因素.采用锁相环电路和变压器支路补偿的硬件电路方式补偿晶体制作时不可避免的并联电容,以提高晶体的液相起振性能,使其工作在串联谐振频率.将所研制的测试系统用于沙门氏菌的生物检测中,有较好的测试效果.

In recent years,the research of array,integrated and intelligent is an important development direction of piezoelectric sensor. A novel monolithic array piezoelectric sensor measuring system is designed and fabricated,which can be used in liquid phase detection. Five electrode units are fabricated on a single piezoelectric chip which are used in the form of plastic packaging. The operation mode of the five pairs of electrodes are controlled by a single chip microcomputer to eliminate the common interference factors during the measurement.Phase locked loop circuit and transformer branch circuit is used to compensate for the inevitable parallel capacitor,which is used to improve the vibration performance of the crystal,and to make it work in series resonant frequency.The developed test system is used for the detection of Salmonella,and has a good test result.