摘要
综述了热压印光刻胶的主要分类,重点介绍了热固性光刻胶和热塑性光刻胶的研究进展,并介绍了2种光刻胶的应用情况,最后指出热压印光刻胶今后的发展方向。
The main classification of hot embossing photoresist was summarized,focusing on the research process of therniosetting photoresist and thermoplastic photoresist,and the application of both the photoresists was introduced.Finally the future research directions of the hot embossing photoresist are reviewed.
出处
《粘接》
CAS
2016年第6期71-74,共4页
Adhesion
关键词
热压印
光刻胶
热固性
热塑性
hot embossing
photoresist
thermosetting
thermoplastic
