摘要
文中概述了近几年硅片切割废砂浆的资源化利用现状,涉及的回收技术包括聚乙二醇回收、硅的直接回收、硅的间接回收、碳化硅回收及切割废砂浆的直接回收。通过分析资源化利用存在的问题,指出以切割废砂浆为原料的直接回收技术不失为一种较好的大规模回收方法。
The research about technologies of resource utilization of silicon wafers cutting waste slurry in recent years are reviewed,including recovery technology of polyethylene glycol, direct recycling technology of silicon,indirect recycling technology of silicon,recovery technology of silicon carbide and direct recycling technology of cutting waste slurry. By analyzing the existing problems of resource utilization,it is pointed out that the direct recovery technology of waste slurry as raw material is a kind of better method for large scale recovery.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2016年第5期1527-1531,共5页
Bulletin of the Chinese Ceramic Society
基金
青海省重点实验室发展专项资金(2014-Z-Y31
2015-Z-Y02)
关键词
硅片
切割
废砂浆
资源化利用
silicon wafers
cutting
waste slurry
resource utilization
