连续分振幅式高功率准分子激光角多路编码光路设计

Sequential amplitude divided angular multiplexing encoding optical system design for high power excimer laser system

在高功率准分子激光系统中,一般采用光学角多路技术来获得高能量窄脉冲输出。文中介绍了角多路技术原理,提出了一种采用矩形阵列和空间层叠光路结构的连续分振幅两次编码方式,并针对该实验室的XeCl高功率准分子激光系统进行了具体的编码光路设计,给出了设计实例。该方法具有编码结构紧凑,编码精度高,与光路准直、激光参数测量系统等兼容性好,便于加工制作和安装调节等优点,目前已在系统中应用,效果良好。

In high power excimer laser system, angular multiplexing technique is employed to achieve both high energy and narrow pulse output. In this article, angular multiplexing technique was introduced, and a multiplexing encoding method was presented. This method encoded seed beam in two steps by sequential amplitude splitting. The optical elements were arranged in rectangle arrays and piled by layers. A specific optical design was made for XeC1 high power excimer laser system in this laboratory. This method of angular multiplexing encoding has advantages of compacted space, small encoding error, good compatibility with alignment and measurement, and is also easy to fabricate and assemble. This design is adopted in the system and performs well.