500W光纤耦合半导体激光模块

500 W fiber-coupled semiconductor laser module

针对半导体激光器在工业领域的应用和光纤耦合可以实现柔性传输的特点,设计了光纤耦合半导体激光模块。采用光束整形技术、空间合束、偏振合束和光纤耦合等技术,将两组共10个整形后的半导体标准阵列进行合束,扩束后耦合入芯径400μm、数值孔径0.22的镀增透膜光纤。在工作电流70 A时,光纤耦合前功率为545 W,光纤耦合后功率为518 W,光纤耦合效率高于95%,得到很高的光纤耦合效率,电光转换效率为43%,为下一步千瓦级光纤耦合半导体激光器的制备奠定了基础。

The semiconductor laser is widely used in industrial fields, and fiber coupling enables flexible transmission. Accordingly, a 500 W high-efficiency fiber-coupled module was designed. The technologies of beam shaping, spatial multiplexing, polarization multiplexing and fiber coupling were used to couple ten bars into a laser beam. Ten bars were collimated by fast axis collimation lens. Then the beams were transformed, and collimated by slow axis collimation optics. And then the beam were combined. All the beam were focused into a multimode fiber （400 μm core diameter, NA=0.22） after expanding. Experimental results show that the laser output from the module can reach to 545 W in the current of 70 A, corresponding the laser output from fiber could reach to 518 W. High coupling efficiency as 95% was obtained, electro-optic conversion efficiency is 43%, which makes a foundation for kilowatt fiber-coupling semiconductor laser.