PLD法制备半球面均匀DLC膜的装置、仿真与实验

Setup, simulation and experiment of uniform DLC film deposited by PLD on large hemispherical substrate

由于激光烧蚀靶材形成的等离子体羽辉呈高斯分布,导致沉积的大面积薄膜尤其是球面衬底上的薄膜极不均匀,严重限制了脉冲激光沉积法的应用。设计构建了旋转与变速摆动相结合的三维衬底机构,实现对半球面不同区域的连续沉积,保证了膜层的均匀性;建立膜厚分布的数学模型,模拟分析了运动参数对膜厚分布的影响;首次利用脉冲激光沉积技术制备出口径200 mm大尺寸半球面衬底上的均匀类金刚石膜,顶角80°范围内膜厚不均匀性≤±5%。脉冲激光沉积法在大口径半球面衬底上制备均匀类金刚石膜在空间观测等领域均具有巨大的应用前景。

Since plasma generated by laser ablating takes on the distribution of Gauss form, it＇s difficult to gain uniform films on the large substrate especially on the hemispherical substrate by the method of pulsed laser deposition technology, which badly limits the actual application of this technology. Setup that could rotate at constant velocity along with swinging at variable velocity was designed. The films could be deposited continuously on different area of hemispherical substrate by using of this setup, which made sure the uniformity of the film. And the math model for distribution of the thickness was founded. Uniform diamond-like carbon film on large hemispherical substrate with 200 mm diameter was deposited by the setup based on the model simulation. The thickness asymmetry of the film was less than ±5% in the range of 80°. Large area homogeneous diamond-like carbon film prepared on hemispherical substrate by pulsed laser deposition method has great application foreground in some especial flied like space detection, and this setup can extend to deposit other films.