摘要
介绍一种基于迈克尔孙干涉的光学元件厚度测量实验装置.首先分析迈克尔孙干涉法测量厚度的原理;然后搭建迈克尔孙干涉光路,利用CCD和计算机对干涉条纹进行采集和观察,使用MATLAB软件对干涉图像进行处理,得出载玻片的厚度信息;最后对影响测量精度的因素进行分析.实验结果表明利用MATLAB软件配合迈克尔孙干涉装置可以更加准确和方便的测量元件厚度.
An experimental apparatus is described,which can be used to measure the depth of optical elements based on the Michelson interferometer. Firstly,the basic theory of a Michelson interferometer is analyzed. Secondly,a Michelson interferometer optical setup is built to measure the depth of the glass slide,it used CCD and computer to capture and observe interference fringes,and MATLAB software is applied for image processing. Finally,the factors affecting the measurement accuracy is given. Experimental results show that it can be more accurate and convenient which use the Michelson interferometer to measure element thickness with the help of MATLAB software.
出处
《大学物理》
北大核心
2016年第5期24-26,49,共4页
College Physics
关键词
迈克尔孙干涉仪
等倾干涉
厚度测量
MATLAB
Michelson interferometer
equal inclination interference
thickness measurement
MATLAB
