基于微气相色谱技术的快速检测系统

The system for rapid detection based on micro-gas chromatography-based

利用微细加工与MENS技术制造了一款微型气相色谱柱,在Pyrex型硼硅玻璃表面刻蚀出400μm的沟道,沟道总长度为5.8 m,均匀的以S形分布于硼硅玻璃芯片上。选用OV-17固定相对色谱柱进行涂敷,针对工业生产中排放的苯系物气体进行快速分离检测。设计了一整套的控制、采样、分离与检测系统,实现在线分离检测,选用灵敏度较高的PID(Photo Ionization Detector)光离子传感器作为终端检测器。精确的控制分离中的主要参数:温度与流量。针对分离苯系物气体混合物的特性,选取甲苯作为实验样本,通过温度与流量的变化实验找到最佳的分离条件参数。可以在10 min内对苯系物进行快速在线分析检测,对苯与甲苯等致癌气体的检测限达到0.523 mg/m^3和0.617 mg/m^3。

In this work,a miniature gas chromatographic column was created using MENS technology.In Pyrex type borosilicate glass surface,S-shape channel was etched with the deep of 400 μm and the total length of5.8 m.OV-17 as stationary phase was coated to the colume.For rapid separation of BTEX gas emissions from industrial production,a set of control,sampling,separation and detection system was designed,and a rapid quantitative detection autosampler module was produced.The higher sensitivity of PID（ Photo Ionization Detector） sensor was chosen as a terminal detector.The two important parameters of temperature and flow could be precisely controlled.According to the characteristics of the gas mixture of benzene,toluene was selected as the experimental sample.The optimal separation conditions were obtained through the experiments of temperature and flow rate.The analysis of BTEX can be achieved within 10 minutes,and the detection limit of cancer-causing benzene and toluene is 0.523 mg/m^3和 0.617 mg /m^3.