摘要
针对如何高效维持无尘室洁净度等级方面的问题,对设备中滚珠丝杠副的发尘规律和无尘室中润滑脂的使用寿命进行了研究。提出了一种发尘量理论来预测设备在工作中的发尘规律,为了验证该理论规律,利用发尘量检测综合实验台对滚珠丝杠副的发尘量特性进行了检测,有效地检测出了滚珠丝杠副在工作中发尘量的多组数据。通过Matlab将测量的多组实验数据进行了拟合,得到了发尘量与发尘源距离之间的分段指数函数,验证了发尘量的扩散特性规律和运动特性对发尘量的影响。实验结果表明,发尘量理论规律有一定的客观依据与实用性,利用这种特性可对其采取相应的除尘手段,在发尘源处减少其发尘量,有效地保证整体环境的洁净度等级。
Aiming at the problem of maintaining the clean room environment level,the particle generation of ballscrew and the service life of the grease was researched,and the theoretical research was presented to find the regular in particle generation. In order to prove this theory,the particle generation comprehensive experimental platform was designed,and the characteristics of ballscrew data was tested out. From this data,the new formula was fit in Matlab,the exponential function about relation between the particle generation and the distance was built.The results indicate this theory has certain objective basis and practicality,the formula could be used to analyze the particles and take some methods to reduce it. There is a way to reduce the particle generation from its source,and ensure overall environment cleanliness level effectively.
出处
《机电工程》
CAS
2016年第6期684-688,共5页
Journal of Mechanical & Electrical Engineering
基金
国家科技重大专项资助项目(2013ZX04008-031)
关键词
发尘量
扩散性
数据拟合
除尘
洁净度
particle generation
diffusivity
data fitting
dust extraction
cleanliness level