摘要
A 2 × 2 optical waveguide coupler at 850 nm based on the multimode interference （MMI） structure with the polysilsesquioxanes liquid series （PSQ-Ls） polymer material and the imprint technique is presented. The influence of the structural parameters, such as the single mode condition, the waveguide spacing of input/output ports, and the width and length of the multimode waveguide, on the optical splitting performance including the excess loss and the uniformity is simulated by the beam propagation method. By inserting a taper section of isosceles trapezoid between the single mode and multimode waveguides, the optimized structural parameters for low excess loss and high uniformity are obtained with the excess loss of -0.040 dB and the uniformity of-0.007 dB. The effect of the structure deviations induced during the imprint process on the optical splitting performance at different residual layer thicknesses is also investigated. The analysis results provide useful instructions for the waveguide device fabrication.
A 2 × 2 optical waveguide coupler at 850 nm based on the multimode interference （MMI） structure with the polysilsesquioxanes liquid series （PSQ-Ls） polymer material and the imprint technique is presented. The influence of the structural parameters, such as the single mode condition, the waveguide spacing of input/output ports, and the width and length of the multimode waveguide, on the optical splitting performance including the excess loss and the uniformity is simulated by the beam propagation method. By inserting a taper section of isosceles trapezoid between the single mode and multimode waveguides, the optimized structural parameters for low excess loss and high uniformity are obtained with the excess loss of -0.040 dB and the uniformity of-0.007 dB. The effect of the structure deviations induced during the imprint process on the optical splitting performance at different residual layer thicknesses is also investigated. The analysis results provide useful instructions for the waveguide device fabrication.
基金
This work was supported in part by the International Science ＆ Technology Cooperation Program of China （No. 2014DFG32590）, National Natural Science Foundation of China （No.61077015, 61307040）, National R＆D Program （No.2012AA040406）, Natural Science Foundation of Liaoning Province （No. 2014020002）, Opening Project of Shanghai Key Laboratory of All Solid-state Laser and Applied Techniques （No. 2013ADL04）, and Fundamental Research Funds for the Central Universities （DUT 13JB01, DUT 15ZD231, and DUT2015TD47）.
