电磁脉冲对MMIC电路中MIM电容的损伤分析

Analysis of the Damage of Electromagnetic Pulse to the MIM Capacitor in MMIC

电容失效是电子电路中常见的故障。通过对某QPSK调制器微波单片集成电路(MMIC)进行失效分析,确定了该产品出现的故障是由MIM电容引起的,进一步地通过故障原因排查和故障机理分析,得知该MIM电容故障是由电磁脉冲(EMP)引起的,最后通过设计试验使故障复现,验证了分析结果的正确性,从而为今后MMIC的老炼试验设计提供了指导。

Capacitor failure is a common failure in electronic circuits. Through the failure analysis of the MMIC of a QPSK modulator, it＇s determined that the failure of the product is caused by the MIM capacitor. Through further troubleshooting and failure mechanism analysis, it＇s known that the failure of the MIM capacitor is caused by electromagnetic pulse. Finally, the failure reappears by designing an experiment, which verifies the correctness of the analysis results, and provides a guidance for the future design of burn-in test of MMIC.