低风速下射频等离子体的辉光放电特性

Characteristics of Radio Frequency Plasma Glow Discharge Under Low Wind Velocity

为研究射频等离子体辉光放电特性与风速、气压之间的关系,以等离子体风速传感器为研究背景,建立了射频等离子体辉光放电实验系统,研究了激励器在不同放电间距（0.05 mm和0.08 mm）、不同来流速度（0-45 m/s）、不同电源输出功率（10 W和20 W）和不同气压（50-100 k Pa）下的放电特性。结果表明：电极间距越小,射频等离子体辉光放电稳定性越高;在固定的电源输出功率和工作频率下,发现了激励器负载电压与来流速度关系的3个阶段：电极过热阶段、线性阶段和放电不稳定阶段;在不同的电源输出功率下,对应不同的风速范围,激励器负载电压与风速具有良好的线性关系;在亚音速气流对应的静压（总压为大气压）范围内,射频等离子体辉光放电对气压变化不敏感。

In order to explore the characteristics of radio frequency（RF） plasma glow discharge versus wind velocity and air pressure, we established an RF plasma glow discharge experimental system under the background of plasma anemometer, and investigated the discharge characteristics of actuator under different discharge gap distances（0.05 mm and 0.08 mm）, wind velocity（0-45 m/s）, output power（10 W and 20 W）, and pressure（50-100 k Pa）. The experimental results show that, with the decrease of air gap spacing, the glow discharge becomes more stability. Under the constant output power and the constant working frequency, the relationship between the actuator load voltage and wind velocity can be divided into three stages： the overheated stage, the linear stage and the unstable stage. Under different output power, the actuator load voltage and wind velocity have a linear relationship at different range of wind velocity. Characteristics of RF plasma glow discharge are insensitive with air pressure under the static pressure corresponding to the subsonic velocity（total pressure is the air pressure）.