摘要
以F-P型带通滤光片标准具为基础,根据膜系设计理论,通过软件优化设计,获得窄带滤光片的膜系。采用射频离子束溅射系统镀制薄膜,用OMS光控方式监控膜厚,并用UV3150分光光度计分析记录样品的光谱数据,测试结果表明:制备的窄带滤光片在510~550nm波长范围内平均透过率大于93%、截止带平均透过率小于0.5%,满足使用要求。
Based on the F-P type band pass filter,along with the film design theory and film design software TFCalc,a narrowband filter which is suitable for the medical beauty machine is optimized.Through the usage of RF ion beam sputtering deposition method,together with OMS method to control the thickness of the film,the narrowband filter is fabricated.By using UV3150 spectrophotometer,the spectrum of the sample is analyzed.Test results show that a narrowband filter that has the average transmittance greater than93% during the 510-550 nm wavelength range and the forbidden-band average transmittance less than 0.5%is made,which is satisfied for the requirement of the utilization.
出处
《青岛大学学报(自然科学版)》
CAS
2016年第2期46-50,62,共6页
Journal of Qingdao University(Natural Science Edition)
基金
国家自然科学基金(批准号:11274188)资助
关键词
窄带滤光片
中心波长
优化设计
射频离子束溅射
narrowband filter
central wavelength
optimal design
RF ion beam sputtering