基于VME总线的光刻机多板卡通信接口设计

Communication Design for Lithography Multi-Boards Based on VME Bus

VME总线由于其高性能、兼容性、并行性和高可靠性一直在图像处理、军事通信等众多领域得到广泛应用。在集成电路芯片的制造设备光刻机中,利用VME总线能使工控机比较方便的对各个板卡进行指令传送和实时数据监控。本文在详细介绍VME总线功能特点的基础上,给出了一种在FPGA中将VME总线时序控制模块和双口RAM结合在一起,以实现工控机通过VME总线与多DSP信号处理板局部总线进行通信的接口设计方案。由仿真和实验结果表明,该接口数据发送和接收时序正确,逻辑严密,运行可靠。

VME bus has been widely used in image processing, military communication and many other fields, because of its four special characteristics of high-performance, compatibility, parallelism and high reliability. In the lithography machine, industrial control computer can conveniently transfer control instructions to each motion control board and monitor its real-time data by use of VME bus. Basing on the detail analyses of the function of VME bus, this article gives an integrate timing control module with the double port RAM in one chip of FPGA and introduces a communication design of interface between the local bus of multiple DSPs and the VME bus of industrial control computer. The simulation and experimental results show that this communication solution is logical and achieves an accurate data transmission, and also works easily and reliably.