非高斯高度分布函数构造的表面形貌的表征

Characterization of the Surface Morphologies Generated from Non-Gaussian Height Distribution Functions

目的研究具有不同高度分布函数的表面形貌粗糙度参数的变化。方法高度分布函数包含了表面形貌的高度信息,通过对其逆运算可重新构建表面形貌。通过统计表征不同高度分布函数所构建的表面形貌的高度类粗糙度参数,并对比分析它们之间的变化关系,从而确定用于准确描述表面形貌的基本高度类参数。结果源于同一种非高斯型的分布函数构建出的表面形貌,部分表征表面形貌的高度类粗糙度参数会保持一致;而源于不同的非高斯型高度分布函数构建出的表面形貌,其部分高度类粗糙度参数(R_a、R_q、R_(sk)、R_(ku))会随高度分布函数形状的变化而发生规律性变化,由此提出了高度类参数简化选择的方式。结论可根据需求选取适当的粗糙度参数来表征表面形貌。对于满足同一高度分布函数的表面形貌,可以通过测量与峰值(谷值)相关的参数(如R_p、R_v等)或高度位置信息相关的参数(如R_(tm)、R_(3y)等),来表征区分不同的表面形貌。对于满足不同高度分布函数的表面形貌,可以通过测量由分布函数确定的参数(R_a、R_q、R_(sk)、R_(ku))来进行初步的表面表征区分,而后再按照需求进行多参数的测量。

Objective To study the change of the roughness parameters with the surface morphologies having different height distribution functions. Methods Height distribution function（HDF） contains the height information of a surface morphology that can be reconstructed through the inverse operation of the HDF. In this paper, we calculated the amplitude roughness parameters used to characterize the different surface morphologies generated by different HDFs. Results By analyzing the correlation of these calculated parameters, it showed that some of the parameters（Ra, Rq, Rsk, Rku） may change correlatively with the shape of the HDFs. Based on the simulation results, a criterion for selecting the suitable amplitude parameters was presented. Conclusion According to the requirements, some suitable roughness parameters could be chosen for characterization of surface morphology. If the surface morphologies had the same height distribution function, they could be characterized by the parameters related either to the surface peek and valley（such as Rp, Rv） or to the height information（such as Rtm, R（3y））. If the surface morphologies had different height distribution functions, they could be simply distinguished by the parameters determined by the height distribution function（such as Ra, Rq, R（sk）, R（ku））, and then the other parameters could be measured according to the requirements.